Productive Technologies Company Limited (Productive Tech, 00650 HK) has reported decisive progress in its semiconductor equipment program, disclosing multiple customer acceptances across furnace tube and single-wafer cleaning platforms.
Productive Tech’s 12-inch LPCVD furnace tube system—engineered for LP-SiN thin-film deposition—has cleared customer acceptance testing. A second 12-inch ALD furnace tube model, designed for ALD-SiN/ALD-SiCN processes and compatible with both Thermal and Plasma modes, is now undergoing on-site validation.
Both tools are core to the Galilee-LP and Galilee-ALD platforms, which target 12-inch logic, DRAM, and 3D-NAND lines covering advanced nodes from 65 nm down to 7 nm. According to the company, the systems achieve high aspect-ratio filling, uniform step coverage, and low contamination levels, while supporting materials such as SiN, Poly, and TEOS—performance metrics matching international suppliers in a market still “predominantly dominated by overseas” competitors.
Productive Tech has also completed development of a Low-K ALD SiOCN furnace tube system aimed at 14 nm and 7 nm nodes for high-performance insulating layers. This segment remains largely controlled by foreign vendors.
In wafer-cleaning, momentum continues. Since October 2025, five units of CUBE 6- to 12-inch single-wafer cleaning equipment have passed acceptance at multiple independent customers, including two repeat orders. The platform, purpose-built for backside cleaning and etching of SiC, power device, and mixed-signal wafers, incorporates ultra-thin wafer handling, Bernoulli transport, and edge-control technologies to deliver what Productive Tech describes as industry-leading productivity.
Management signaled ongoing efforts to complete deliveries, broaden the high-quality customer base, and accelerate domestic substitution of advanced semiconductor tools. The disclosed transactions do not meet Hong Kong Listing Rule thresholds for notifiable transactions.
Shareholders and potential investors are advised to exercise caution when dealing in the company’s securities, consistent with the board’s statement dated 24 March 2026.
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