Nova (NVMI) reported Q1 non-GAAP earnings Thursday of $2.33 per diluted share, up from $2.18 a year earlier.
Analysts surveyed by FactSet expected $2.19 per share.
Revenue for the quarter ended March 31 was $235.3 million, up from $213.4 million a year earlier.
Analysts polled by FactSet expected $227 million.
The company said it expects Q2 non-GAAP diluted EPS of $2.34 to $2.48 per share on revenue of $245 million to $255 million. Analysts polled by FactSet expect $2.34 and $238.7 million, respectively.
Shares of Nova were up more than 5% in recent premarket activity Thursday.
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